Perpendicular magnetic film of spinel type iron oxide compound and its manufacturing process
US4975324A · kind A · utility
24Cited by
8References
7Claims
0Family size
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Key dates
| Filing date | Oct 21, 1987 |
| Grant date | Dec 4, 1990 |
| Priority date | — |
| Expiry date | Oct 21, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/257
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Disclosed herein is a perpendicular magnetic film of spinel type iron oxide formed on a surface of a base substrate in the form of columnar grains which are densely arranged perpendicularly to the surface of the base substrate. A vapor of an organic iron compound or a mixed vapor consisting of the organic iron compound vapor and a vapor of an organic metal compound different from the organic iron compound is added with oxygen to obtain a mixed gas. The mixed gas is subjected to chemical vapor deposition on the substrate at low temperature, at reduced pressure in plasma, thereby to obtain the perpendicular magnetic film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.