Purification of silane gas
US4976944A · kind A · utility
13Cited by
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22Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 24, 1988 |
| Grant date | Dec 11, 1990 |
| Priority date | — |
| Expiry date | Oct 24, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/046
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Impure gaseous silane containing such impurities as, in particular, phosphines and arsines, is purified, whether by chemisorption and/or physical adsorption, by contacting such silane gas with a sorption mass that includes cooper values, e.g., a copper cation-exchanged molecular sieve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.