Patent · US Expired

Pump stage for a high-vacuum pump

US4978276A · kind A · utility

7Cited by

4References

20Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Hans-Peter Kabelitz · Cologne, DE
Winfried Kaiser · Cologne, DE
Hans-Guenter Stueber · Cologne, DE

Key dates

Filing date	Oct 10, 1989
Grant date	Dec 18, 1990
Priority date	—
Expiry date	Oct 10, 2009

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D19/046
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A high-vacuum pump includes a plurality of pump stages, each of which has a rotor and a stator. In one of the pump stages, either the rotor or the stator is provided with a structure that effects the gas conveying includes radially extending webs whose pitch and width decrease from the suction side of the pump stage to the thrust side of the pump stage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.