Electrode for vapor deposition and vapor-deposition method using same
US4978556A · kind A · utility
7Cited by
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5Claims
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Key dates
| Filing date | Jan 25, 1990 |
| Grant date | Dec 18, 1990 |
| Priority date | — |
| Expiry date | Jan 25, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/325
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Thermal breakage of crystalline electrodes used in arc-vapor deposition is prevented by originally fabricating the electrodes from broken pieces of the crystalline material which are slightly sintered together and form an electrode body in which a carbon rod or other conductor is embedded to provide electrical contact. The particles are sintered in a vacuum oven and a pool of the electrode material can be formed at a working end of the electrode body when the latter is used for arc-vapor deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.