Electron microscope for investigation of surfaces of solid bodies
US4978855A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 1990 |
| Grant date | Dec 18, 1990 |
| Priority date | — |
| Expiry date | Feb 7, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2482
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Electron microscope for investigation of surfaces of solid bodies with a primary beam path along which are arranged sequentially an electron beam source, an electron lens, an energy-selective electrostatic deflecting field, a magnetic deflecting field, a cathode lens, in whose object plane lies the test surface to be investigated, further with a secondary beam path, which passes in sequence through the cathode lens, the magnetic deflecting field, an energy filter, which includes a decelerating lens, a contrast stop, an electrical sector field, an energy stop and an accelerating lens, and two projection lenses, to a detector, such as a luminescent screen. The first-mentioned electrostatic deflecting field compensates for the energy dispersion of the magnetic deflecting field in the entrance side focal plane of the cathode lens. The energy filter limits the energy range of the electrons in the secondary beam path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.