Magnetoresistor
US4978938A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 1989 |
| Grant date | Dec 18, 1990 |
| Priority date | — |
| Expiry date | Oct 25, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/09
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetoresistive sensor that includes a very thin film of monocrystalline semiconductive material, having at least a moderate carrier mobility and no greater than a moderate carrier density. The device includes means for inducing or enhancing an accumulation layer adjacent the film outer surface. With film thicknesses below 5 micrometers, preferably below 3 micrometers, the presence of the accumulation layer can have a very noticeable effect. The unexpected improvement provides a significant apparent increase in mobility and conductivity of the semiconductive material, and an actual increase in magnetic sensitivity and temperature insensitivity. A method for making the sensor is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.