Chemical refill system
US4979643A · kind A · utility
42Cited by
6References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1989 |
| Grant date | Dec 25, 1990 |
| Priority date | — |
| Expiry date | Mar 22, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/165
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.