Plasma generators
US4980610A · kind A · utility
27Cited by
4References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 15, 1988 |
| Grant date | Dec 25, 1990 |
| Priority date | — |
| Expiry date | Aug 15, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma generator utilizing two magnetrons preferably acting out of phase with each other and each comprising one part of the other magnetic mirror. There may be included a thermal fragmenter to produce gas atoms directly into the plasma for ionization before being drawn onto a substrate. The use of a thermal fragmenter separate from the magnetrons produces ionized atoms directly where they are needed and allows quicker changeover to alternative atoms for multilayer coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.