Force delivery system for improved precision membrane probe
US4980637A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1988 |
| Grant date | Dec 25, 1990 |
| Priority date | — |
| Expiry date | Sep 23, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0735
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a test probe [10] for testing a test device [not shown], also known as a device under test, while precisely controlling the force exerted by the test probe [10] on the test device. Included is a translation ring [18] as well as a carrier [12] formed to have at least a first side and a second side. The support means [12] is coupled to the translation ring [18]. Also included is at least one flexure pivot [14] for delivering a force to a test device; the flexure pivot [14] is coupled to the first side of the carrier. A membrane [16] is coupled to the second side of the carrier. Finally, at least one signal contact bump [24] is mounted on the membrane [16] for communicating an electric current between the test probe [10] and the test device [not shown].
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.