Thermal transfer printer for producing a photomask
US4981765A · kind A · utility
8Cited by
9References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 8, 1988 |
| Grant date | Jan 1, 1991 |
| Priority date | — |
| Expiry date | Aug 8, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0002
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention relates to the use of a thermal transfer printer and of an ink ribbon containing a pigment or dye that absorbs light in the range from 350 to 450 nm for the direct production of a photomask from an electronically coded sources of information on a metal plate (PS plate) coated with a positively working photopolymer which is sensitive to light in the range from 350 to 450 nm, and, as surface layer, with a polymer which is soluble in alkaline solution and is permeable to light in the range from 350 to 450 nm, such that the image produced by the thermal transfer printer on the PS plate is used direct as photomask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.