Pressure sensor and method for manufacturing it
US4984468A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 23, 1990 |
| Grant date | Jan 15, 1991 |
| Priority date | — |
| Expiry date | Feb 23, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor having high measuring accuracy comprises a ceramic base of hat-like shape having a stable clamping portion, a diaphragm support portion spaced from said clamping portion and a flexible transition portion connecting said clamping portion with said diaphragm support portion; a ceramic diaphragm deformable in dependence on pressure applied thereto, formed unitary in said diaphragm support portion at a top surface thereof; and transducer means applied to a main surface of said diaphragm for converting any deformation of said diaphragm into electric signals representing said pressure applied to said diaphragm. In a manufacturing method for such a pressure sensor the diaphragm and the base comprising the clamping portion are formed in one method step into a homogenous sensor body prior to burning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.