Force meter with optical waveguide integrated in a substrate
US4984863A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 1989 |
| Grant date | Jan 15, 1991 |
| Priority date | — |
| Expiry date | Sep 21, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/243
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical waveguide force meter for the measurement of forces or stresses integrated on a single substrate, including: a single-mode transducer waveguide supporting only the stresses which are applied through the intermediate portion of an upper plate of the force meter; a coupling/mixing grating having N focussing concave gratings provided adjacent an exit end of the optical waveguide; N detectors arranged at each of the N focussing points of waves defracted by the coupling/mixing grating; N TM polarization filters arranged respectively between each concave grating and each detector; and a single-mode laser source. The waveguide, coupling/mixing grating and polarization filters are all provided on the single substrate. The single-mode laser source and detectors are supported by the substrate and by an underlying base plate member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.