Process for producing a base metal thin film and an electronic device using the same
US4985071A · kind A · utility
2Cited by
8References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1989 |
| Grant date | Jan 15, 1991 |
| Priority date | — |
| Expiry date | Jan 12, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/08
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A process for producing a thin film of a base metal on a substrate which comprises thermally decomposing in oxidative atmosphere an organic or inorganic compound containing a base metal compound formed on a substrate to form the oxide of the metal and then reducing the oxide by heat-treating it in reductive atmosphere. A temperature sensor, magnetic sensor, and ceramic wiring substrate utilizing the base metal thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.