Multi-functional sensor
US4986127A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 1989 |
| Grant date | Jan 22, 1991 |
| Priority date | — |
| Expiry date | Apr 5, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Multi-functional sensor comprises a support base made from borosilicate, a diaphragm with a E-shaped section secured to the base, the diaphragm being made from single crystalline silicon, principal plane thereof being oriented to be a crystalline plane (110), a differential pressure sensor having p-doped piezoresistor elements formed in the principal plane of the diaphragm at a thin wall portion of the E-shaped sectional diaphragm, each element being arranged along a crystal axis <111>, a static pressure sensor having p-doped piezoresistor elements formed in the principal plane at an outer peripheral thick wall portion of the E-shaped sectional diaphragm, each element being arranged along the crystal axis <111>, and a temperature sensor having a p-doped piezoresistor element formed in the principal plane at the outer peripheral thick wall portion of the E-shaped sectional diaphragm, the element being arranged along the crystal axis <100>. In the multi-functional sensor thus constructed, deviation of the output signal from the differential pressure sensor due to the influence of the temperature and static pressure can be removed easily to obtain the correct signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.