Method for production of trichloromonosilane
US4986971A · kind A · utility
10Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1989 |
| Grant date | Jan 22, 1991 |
| Priority date | — |
| Expiry date | Nov 9, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/10763
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present application relates to a method for production of trichloromonosilane in a fluidized bed reactor by reaction of silicon powder and HCl at a temperature between 280.degree. and 300.degree. C. wherein silicon powder which has been produced by gas atomization of molten silicon is used. The gas atomized silicon powder has a preferred particle size between 1 and 1000 .mu.m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.