Method and apparatus for removing minute particles from a surface
US4987286A · kind A · utility
58Cited by
4References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 30, 1989 |
| Grant date | Jan 22, 1991 |
| Priority date | — |
| Expiry date | Oct 30, 2009 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/361
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Method and apparatus for removing minute particles (as small as submicron) from a surface to which they are adhered. An energy transfer medium is interposed between each particle to be removed and the surface to which the particles are adhered. The medium is an irradiated with laser energy at a wavelength which is strongly absorbed by the medium. The medium absorbs sufficient energy to cause explosive evaporation with sufficient force to dislodge the particles. Preferably means are provided to remove dislodged particles to prevent redeposit on the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.