Apparatus for forming organic thin film
US4987851A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1988 |
| Grant date | Jan 29, 1991 |
| Priority date | — |
| Expiry date | Dec 30, 2008 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An organic film forming apparatus includes a trough storing water therein and a work drive device for moving a work with respect to the trough. The surface of the water is partitioned by a rod into a first developing region on which a monomolecular film is developed and a second developing region on which no monomolecular film is developed. The work is moved by the device through the developed monomolecular film so as to adhere the film on the surface of the work. The device has a holding mechanism which has a holding portion engaged with the work, and which holds the work so that when the work passes through the developed monomolecular film, the holding portion is away from the film or passes through the film after almost the entire work passes through the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.