Method of manufacturing a gas detection sensor, and the resulting sensor
US4988539A · kind A · utility
9Cited by
1References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 1989 |
| Grant date | Jan 29, 1991 |
| Priority date | — |
| Expiry date | Dec 6, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of manufacturing a sensor for detecting trace or impurity gases, the method comprising evaporating tin and/or tin oxides under a partial pressure of oxygen in order to condense vapor on an electrically insulating substrate to obtain a porous layer deposit therein. The metal or the metal oxides is/are evaporated under a flow of a mixture of gases containing both oxygen and an inert gas at a total pressure of not less than 100 pascals and with the partial pressure of the oxygen in the mixture being not more than 130 pascals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.