V-shaped groove inspecting and working method
US4989338A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1989 |
| Grant date | Feb 5, 1991 |
| Priority date | — |
| Expiry date | Sep 28, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of inspecting V-shaped grooves carried out in the following steps. Coordinates of points more than 20 per groove on a substrate formed with V-shaped grooves are measured with a stylus moving in directions perpendicular to longitudinal directions of the grooves. Measured data within distances at least 10 .mu.m from edges and groove bottoms of the grooves are removed from all data to find effective measuring segments. Shapes formed by straight lines are then calculated on the basis of the remaining data on effective measuring segments having a length of more than 40 .mu.m. A method of working V-shaped grooves is effected in the following steps. A circle having a diameter substantially equal to that of fibers to be supported in the groove is so drawn that the circle is inscribed in an interior of a V-shaped groove calculated by the above method. The V-shaped groove of a substrate is then worked, while errors in center position of the circle are fed-back into the working process of the groove of the substrate to compensate for depths and pitches of the V-shaped grooves being worked.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.