Patent · US Expired

Micro secondary electron multiplier

US4990827A · kind A · utility

22Cited by

7References

27Claims

0Family size

Assignee

Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

Wolfgang Ehrfeld · Karlsruhe, DE
Herbert Oskar Moser · Karlsruhe, DE
Dietrich Munchmeyer · Blankenloch, DE

Key dates

Filing date	Mar 17, 1988
Grant date	Feb 5, 1991
Priority date	—
Expiry date	Mar 17, 2008

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2201/3425
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A micro secondary electron multiplier or an array thereof employs discrete dynodes which are microstructured and applied to an insulating substrate plate. The substrate plate is provided with electrical conductor paths for the connection of the dynodes. The dynodes can be made using a technique such as X-ray depth lithography-galvanoplasty (the LIGA technique). The micro secondary electron multiplier or an array of such multipliers is extremely small and sensitive, and has a high time resolution. Furthermore there is considerable flexibility in positioning the multipliers of an array.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.