High purity gas delivery control assembly
US4991619A · kind A · utility
15Cited by
4References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 15, 1989 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Dec 15, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/4259
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The invention relates to a high purity gas delivery control assembly (100) having straight through gas flow. The bellows (118) which operates a gas flow interruption means (114) is isolated during gas flow and dead volumes are reduced to a minimum. This prevents the introduction of unwanted particles into the gas stream.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.