Method for optimizing contrast in an image of a sample
US4991970A · kind A · utility
7Cited by
1References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 1989 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Jan 13, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention concerns a method for optimizing contrast in an image of a sample. This sample (5) comprises a whole number of zones having different reflection or transmittance factors. These zones are illuminated by a light source (7) and the image is obtained at the output of an optical system (4) to be analyzed by a sensor (10) supplying on the outputs recording signals of this image. Contrast optimization consists of determining the characteristics of an optimal fiber to be inserted between the source (7) and the sample (5) to be controlled. Application in particular for the control of in-production integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.