Scanning tunneling microscope
US4992660A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 25, 1990 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Jun 25, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning tunneling microscope using a tip which can be easily replaced. The microscope includes a piezoelectric drive mechanism for driving the tip, a tip holder to which the tip is attached, and a sample holder. The tip holder can be detachably mounted to the piezoelectric drive mechanism. The Z-axis of a coordinate system extends through the tip holder and across the sample surface during observation. A replacement rod for replacng the tip holder is mounted so as to be movable along the Z-axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.