Patent · US Expired

Scanning tunneling microscope

US4992660A · kind A · utility

69Cited by
3References
5Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 25, 1990
Grant dateFeb 12, 1991
Priority date
Expiry dateJun 25, 2010

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/873
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning tunneling microscope using a tip which can be easily replaced. The microscope includes a piezoelectric drive mechanism for driving the tip, a tip holder to which the tip is attached, and a sample holder. The tip holder can be detachably mounted to the piezoelectric drive mechanism. The Z-axis of a coordinate system extends through the tip holder and across the sample surface during observation. A replacement rod for replacng the tip holder is mounted so as to be movable along the Z-axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.