Multipurpose gaseous detector device for electron microscope
US4992662A · kind A · utility
36Cited by
9References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 13, 1989 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Sep 13, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides for a scanning electron microscope which detects photons produced by contact between radiation emitted from the surface of a sample and gas molecules of a gaseous medium which surrounds the sample. The invention also provides a method for microscopically imaging the surface of a sample through the use of gaseous photon detection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.