Filamentless magnetron-ion source and a process using it
US4992665A · kind A · utility
32Cited by
6References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 26, 1989 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Jun 26, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a filamentless magnetron-ion source with a magnetron, a microwave guide or a microwave coaxial line, a cylindrical cavity resonator, a lambda-4-short circuit slider member, ECR magnets and a quartz dome. The invention also relates to a process using the said apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.