Patent · US Expired

NMOS transistor having inversion layer source/drain contacts

US4994869A · kind A · utility

17Cited by
0References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 1989
Grant dateFeb 19, 1991
Priority date
Expiry dateJun 30, 2009

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S257/90

Abstract

A transistor (42) is provided having a gate conductor (44) formed adjacent a semiconductor substrate (46) and separated therefrom by a gate insulator (48). Sidewall spacers (52, 54) are formed at the sides of gate conductor (44) and adjacent semiconductor substrate (46). Diffused regions (56, 58) are formed within semiconductor substrate (46) in order to provide source/drain regions for transistor (42). Positive charges from radiation are trapped within sidewall spacers (52, 54) thereby attracting negative charges from semiconductor substrate (46) such that a negative charge layer is created between diffused region (56) and gate edge (50a) and also between diffused region (58) and gate edge (50b).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.