Acoustic microscope surface inspection system and method
US4995259A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1989 |
| Grant date | Feb 26, 1991 |
| Priority date | — |
| Expiry date | Mar 9, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/343
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.