Vapor phase reactor for making multilayer structures
US4997677A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1987 |
| Grant date | Mar 5, 1991 |
| Priority date | — |
| Expiry date | Aug 31, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gaseous mixture is introduced through a radial inlet into a plenum-like antichamber above a porous diaphragm mounted across the top of a reactor vessel of substantially uniform width. The antichamber and diaphragm are substantially coextensive with the width of the vessel. The diaphragm may form part of a removable cover/diaphragm unit received in a collar-like ring. The substrate holder includes a molybdenum cap and base which fits over a pedestal of refractory material carrying a temperature sensor with an electrical lead extending down the hollow core of a rotatable reactor The Government has rights in this invention pursuant to Contract Number F19628-85-C-0002 awarded by the Department of the Air Force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.