Water soluble contrast enhancement composition with 1-oxy-2 diazonaphthalene sulfonamide salt and polyvinyl alcohol
US4997742A · kind A · utility
4Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 1988 |
| Grant date | Mar 5, 1991 |
| Priority date | — |
| Expiry date | Dec 9, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A water soluble contrast enhancement compound and composition, and a method of use thereof, are disclosed for improving sidewall profiles in photoresist patterning and developing. The compound consists of a 1-oxy-2-diazonaphthalene sulfonamide salt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.