Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
US4998016A · kind A · utility
38Cited by
2References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1990 |
| Grant date | Mar 5, 1991 |
| Priority date | — |
| Expiry date | Jun 28, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.