Polishing apparatus
US4999954A · kind A · utility
20Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 15, 1990 |
| Grant date | Mar 19, 1991 |
| Priority date | — |
| Expiry date | Aug 15, 2010 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B13/06
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is disclosed a polishing apparatus utilizing a gel material as the polishing tool, in which the gel material is rotated in the vicinity of a surface to be polished, or is given rotating and rocking motions in direct contact with the surface to be polished.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.