Thin film peeling apparatus
US5000816A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 1989 |
| Grant date | Mar 19, 1991 |
| Priority date | — |
| Expiry date | Apr 25, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1944
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A thin film peeling apparatus in which a portion of a thin film adhered to a base plate is initially lifted and subsequently peeled therefrom. The film peeling apparatus includes a conveying device for conveying the base plate along a base plate conveyance path, a first thin film conveyance device for conveying the lifted portion of the thin film and a second thin film conveyance device for subsequently conveying the thin film. The first thin film conveyance device is disposed so that the thin film is peeled in a direction substantially perpendicular to the direction of conveyance of the base plate. The second thin film conveyance device includes at least one fluid ejector for ejecting fluid against the thin film such that the thin film is conveyed in a direction parallel to the surface of the base plate and substantially perpendicular to the direction of conveyance of the base plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.