Scanning electron microscope and method of processing the same
US5001344A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 8, 1989 |
| Grant date | Mar 19, 1991 |
| Priority date | — |
| Expiry date | Aug 8, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An image generated by the detected signals of a scanning electron microscope is divided, for example, into a plurality of rectangular small areas with the boundaries parallel to the y-axis. The relative height in the boundary is obtained by conducting one dimensional integration for respectively boundaries. Thereafter, the relative height difference between the boundaries is determined by conducting one dimensional integration for each area in the direction perpendicular to the boundary. Thereby, the surface three dimensional topography having less distortion can be measured, even in case errors are included in the normal distribution which indicates the surface topography of the specimen, by adjusting and determining the height in the area by the interporating operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.