Surface metrological apparatus
US5001409A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1989 |
| Grant date | Mar 19, 1991 |
| Priority date | — |
| Expiry date | Jun 7, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an apparatus for measuring texture and characterization of the surface of a sample on the basis of the drive signal of a servo control circuit by allowing a probe-tip (1) to approach the sample (2) and subjecting the probe-tip (1) to servo control so that a current, which is generated by moving the probe-tip (1) on the sample surface and which flows between the probe-tip (1) and the sample (2), becomes constant, the present invention discloses a surface metrological apparatus comprising a circuit (11, 12) for correcting the texture and characterization of the sample by use of a current error of the measured value of the current described above from the set current value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.