Apparatus for purifying laser gas
US5001721A · kind A · utility
17Cited by
7References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 1989 |
| Grant date | Mar 19, 1991 |
| Priority date | — |
| Expiry date | Oct 13, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/041
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for purifying laser gas comprises first and second tubes 20, 22 in good thermal contact, liquid nitrogen flowing through the first tube 20 and laser gas flowing through the second tube 22. The laser gas is precooled in an arrangement of third and fourth tubes 24, 26, the laser gas to be cleaned entering the third tube 24 which opens into the second tube 22 so that precooled laser gas enters the second tube which opens into the fourth tube to effect the precooling.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.