Method for making titanium nitride
US5002646A · kind A · utility
10Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 1989 |
| Grant date | Mar 26, 1991 |
| Priority date | — |
| Expiry date | Apr 20, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/80
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method which comprises the manufacture of black titanium nitride which comprises heating ammonia and titanium halide by means of an electric plasma formed in a stream of non-oxidizing gas generated by the discharge of direct current electricty between a pair of electrodes. The heated gases are introduced through an inlet nozzle into a reactor so constructed and operated as to induce circulation of the gases with a specifically defined recirculation ratio.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.