Method using x-rays to determine thickness of organic films
US5003569A · kind A · utility
14Cited by
3References
4Claims
0Family size
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Key dates
| Filing date | Mar 14, 1990 |
| Grant date | Mar 26, 1991 |
| Priority date | — |
| Expiry date | Mar 14, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B15/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thickness determination method for organic films comprises the steps of: irradiating an organic film to be measured with x-rays at a certain angle of incidence, finding an angle of reflection at which the x-ray intensity reaches a peak, and finding the thickness of the film from the angle of this peak.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.