Production of phenylarsines
US5004821A · kind A · utility
1Cited by
3References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 27, 1989 |
| Grant date | Apr 2, 1991 |
| Priority date | — |
| Expiry date | Dec 27, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/40
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Organic metallic compounds in the form of phenylarsines are used in epitaxy processes, such as MO-VPE. MO-CVD or MOMBE processes, as well as for ion implantation or the in-situ doping of polysilicon for semi-conductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.