Patent · US Expired

Probe head of the switching type

US5005297A · kind A · utility

14Cited by

5References

12Claims

0Family size

Assignee

Carl-Zeiss-Stiftung, Heidenheim/Brenz · DE

Inventors

Hans-Peter Aehnelt · Oberkochen, DE
Michael Wirth · San Antonio, US

Key dates

Filing date	Dec 15, 1989
Grant date	Apr 9, 1991
Priority date	—
Expiry date	Dec 15, 2009

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S33/01
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

For a horizontal orientation of a switching-type probe head, force developing device is provided to compensate for a component (F.sub.1) of the gravitational weight vector (F.sub.g) of the deflectably movable part (11) of the probe head, the compensating force being perpendicular to the direction of loading the movable part (11) into its at-rest (undeflected) null position in the probe head. This force-developing device is illustratively a magnetic bearing (5, 6) which is operative without involving any added mechanically contacting action within the probe head.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.