Accelerometer with coplanar push-pull force transducers
US5005413A · kind A · utility
50Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1989 |
| Grant date | Apr 9, 1991 |
| Priority date | — |
| Expiry date | Feb 27, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A push-pull accelerometer in which both force transducers lie in a common plane. Thus, when implemented in silicon micromachined device, both transducers can be fabricated from a single crystal layer, thereby producing transducers with closely matched common mode responses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.