Method of making an electrostatic silicon accelerometer
US5006487A · kind A · utility
118Cited by
7References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 27, 1990 |
| Grant date | Apr 9, 1991 |
| Priority date | — |
| Expiry date | Mar 27, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/924
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A solid state accelerometer having an all silicon sensor for measuring accelerational and gravitational forces. The accelerometer measuring system also has associated electronics that include an analog rebalance loop and a digitizer loop.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.