Analytical method and apparatus
US5006706A · kind A · utility
14Cited by
18References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 31, 1989 |
| Grant date | Apr 9, 1991 |
| Priority date | — |
| Expiry date | May 31, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32018
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for analyzing solid sample materials is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous sample cathode and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.