Method of evaluating a semiconductor device and an apparatus for performing the same
US5006717A · kind A · utility
25Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 26, 1989 |
| Grant date | Apr 9, 1991 |
| Priority date | — |
| Expiry date | Dec 26, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6421
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for evaluating the lifetime of a semiconductor device are disclosed. Luminescence of a predetermined wavelength which is emitted from an operating semiconductor device is detected. The luminescence of the predetermined wavelength is one which correlates with the degradation of the semiconductor device. Then, the image of detected luminescence of the predetermined wavelength is processed to determine the place of the degradation caused by hot carriers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.