Binders soluble in aqueous alkali and containing silanyl groups in the side chain, process for preparing same and also photosensitive mixture containing these compounds

US5008362A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Peter Wilharm · Meitingen, DE
• Gerhard Buhr · Königstein, DE
• Juergen Fuchs · Flörsheim, DE

Key dates

• Filing date: Apr 3, 1989
• Grant date: Apr 16, 1991
• Expiry date: Apr 3, 2009

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0758
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

A silylated polymeric binder, which is soluble or swellable in alkali, bears a plurality of at least one of aliphatic and aromatic hydroxyl groups, at least a portion of which are derivatized by units of the formula I and II: EQU [(A-B.sub.n).sub.m C]--[(D.sub.o E.sub.p)BC].sub.u (I) and EQU [(D.sub.o E.sub.p)BC].sub.v (II) which are side chains of the polymeric binder, wherein PA0 A denotes a silanyl group containing at least 2 silicon atoms in total linked to each other, but not more than 3 silicon atoms linked to each other in an unbranched chain or silicon atoms; PA0 B denotes a bridging group; PA0 C denotes a functional group which has formed a covalent bond with an aromatic, aliphatic, or cycloaliphatic hydroxyl group of the binder, the group D, or the group E; PA0 D denotes a grafted monohydric or polyhydric aliphatic alcohol; PA0 E denotes a grafted monohydric or polyhydric aromatic alcohol; PA0 n denotes 0 or 1; PA0 m denotes 1 or 2; and o, p, u and v each denote 0 or 1. Photosensitive mixtures containing this binder are resistant to plasma etching, stable on storage and having a high thermal stability.