Coaxial liquid cooling of high power microwave excited plasma UV lamps
US5008593A · kind A · utility
37Cited by
11References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 1990 |
| Grant date | Apr 16, 1991 |
| Priority date | — |
| Expiry date | Jul 13, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/044
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a high power microwave excited plasma system including a microwave energy source operatively coupled to a plasma tube for generating a plasma within the tube, a gaseous medium within the tube for supporting a plasma and a reflector for focusing radiation emitted from the tube, an improved cooling system for the tube is provided which comprises a jacket surrounding the tube and defining a passageway therearound, a source of liquid dimethyl polysiloxane, and a circulator for conducting the liquid dimethyl polysiloxane through the passageway in heat exchange relationship with the tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.