Methods of producing vacuum devices and infrared detectors with a getter
US5012102A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 7, 1990 |
| Grant date | Apr 30, 1991 |
| Priority date | — |
| Expiry date | May 7, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J7/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A device chamber (12) is evacuated by pumping via an evacuation tube (35) to produce a vacuum space in communication with a chemically-active getter (30) which is provided in the tube (35) to getter gases from the evacuated chamber (12). In accordance with the invention, the getter (30) in the form of one or more movable bodies of the getter material is activated by heating in the evacuation tube (35) at a safe location (36) distant from the chamber (12). It is then moved towards the chamber (12) and is retained in the sealed evacuation-tube outlet (31) of the device. A vacuum-permeable screen (12) in the evacuation-tube outlet (31) inhibits passage of the getter material (30) into the chamber (12) where it might, for example, otherwise damage or obscure an infrared detector element. This permits the inclusion of the getter (30) in an inexpensive manner which does not require the use of a getter unit with a support element and/or vacuum-sealed electrical connections, and is compatible with space limitations and standard device envelope requirements for infrared detectors. Furthermore, the getter (30) is activated by heating at a location which avoids damage to the device, and after…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.