Vacuum system
US5013384A · kind A · utility
9Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 22, 1990 |
| Grant date | May 7, 1991 |
| Priority date | — |
| Expiry date | Jun 22, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An inlet opening in an evacuatable vacuum system is substantially enlarged and closed off by a porous plate so that the ingress of dust is avoided and a very uniform inflow of gas is realized. A similar plate can be used for closing off a gas outlet opening of the vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.