Superconducting alloys comprising tungsten, molybdenum, silicon and oxygen
US5013526A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1989 |
| Grant date | May 7, 1991 |
| Priority date | — |
| Expiry date | Nov 17, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12806
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A superconducting material made of tungsten or molybdenum containing a specified amount of silicon, a wiring made of this superconducting material, and a semiconductor device using this wiring. The above-mentioned superconducting material undegoes no damage even in the steps of heat treatments effected after the formation of a wiring therefrom by virtue of its high melting point, and can be very easily patterned by reactive ion etching using SF.sub.6 as an etching gas, which has heretofore been generally employed. These features, in which conventional superconducting materials are lacking, allow the superconducting material of the present invention to exhibit excellent properties particularly when used in the wirings of a semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.