X-Y stage with ultrasonic actuator
US5013958A · kind A · utility
12Cited by
4References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 1989 |
| Grant date | May 7, 1991 |
| Priority date | — |
| Expiry date | Oct 17, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/026
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An X-Y stage including a fixed plate, a moving plate adapted to linearly reciprocatively move relative to the fixed plate, and an ultrasonic linear motor provided on either the fixed plate or the moving plate. The ultrasonic linear motor is provided with at lest two leg portions oriented in a direction perpendicular to a moving direction of the moving plate, a body portion for connecting base ends of the leg portions, and vibration sources for vibrating the leg portions and the body portion. The leg portions have free ends pressed against the other of the fixed plate on which the motor is not provided and the moving plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.