Patent · US Expired

Test probe manipulator for wafer-probing apparatus

US5014001A · kind A · utility

5Cited by

9References

19Claims

0Family size

Assignee

Deutsche ITT Industries, GmbH · DE

Inventors

Hans U. Schmidt · Griesheim, DE
Helmut Gunter · Schallstadt, DE

Key dates

Filing date	May 14, 1990
Grant date	May 7, 1991
Priority date	—
Expiry date	May 14, 2010

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06705
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The test-probe manipulator for a test probe for use with semiconductor wafers utilizes three adjusting spindles (50,51,52) arranged on the same side of the manipulator. The test-probe manipulator occupies little space and is easy to operate. All three axes of translational freedom perform linear motions independent of each other. Accuracy of adjustment is improved as compared to conventional devices. Easy placement on and removal from a test platform are ensured.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.